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DPT & TSV SIO©ü
BEMAS (ZOA140) [Si14-007]
Physical Characteristics
Chemical Name
Bis(ethylmethylamino) Silane
Formula
H
2
Si[(N(CH
3
)C
2
H
5
)]
2
Molecular Weight
146.30
Boiling Point
134¡É
Density
0.80
Phase at 25 ¡É
Colorless Liquid