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UP Chemical Co.,Ltd.

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      • Capacitor & Gate High-k Dielectrics
      • Capacitor & 
Gate Elctrode
      • DPT & TSV SIO©ü
      • SIO©ü/SIN
      • GST
      • Metallization
      • ReRAM
      • Spin-on Dielectric
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TEMAT [Ti22-001]

Physical Characteristics
Chemical Name Tetrakis(ethylmethylamino) Titanium
Formula Ti[N(CH3)(C2H5)]4
Molecular Weight 280.32
Boiling Point 80¡É/0.1torr
Density 0.92g
Phase at 25 ¡É Pale yellowish liquid
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