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Capacitor & Gate High-k Dielectrics
TEMAT [Ti22-001]
Physical Characteristics
Chemical Name
Tetrakis(ethylmethylamino) Titanium
Formula
Ti[N(CH
3
)(C
2
H
5
)]
4
Molecular Weight
280.32
Boiling Point
80¡É/0.1torr
Density
0.92g
Phase at 25 ¡É
Pale yellowish liquid