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Capacitor & Gate High-k Dielectrics
CpHf(NMe
2
)
3
(ZOA213) [Hf72-003]
Physical Characteristics
Chemical Name
Cyclopetadienyl Tris(dimethylamino) Hafnium
Formula
CpHf[N(CH
3
)
2
]
3
Molecular Weight
375.81
Boiling Point
81¡É/0.1torr
Density
1.56
Phase at 25 ¡É
Colorless liquid