Physical Characteristics
- Chemical nameAluminum, trimethyl-
- CAS No75-24-1
- Molecular Weight72.1 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point125℃
- Viscosity0.9 cP at 30℃
High-k Dielectric Materials
High-k dielectric materials are highly reactive and reactive precursors suitable for the Atomic Layer Deposition process of high-k metal oxide films.
High-k dielectric films are effective gate oxide & capacitor dielectric precursors for Memory and Logic Device Applications.
TMA
닫기
TMA
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TiO2
닫기
TiO2
Physical Characteristics
- Chemical nameTrimethoxy[(1,2,3,4,5-η)-1,2,3,4,5-pentamethyl-2,4-cyclopentadien-1-yl]titanium
- CAS No123927-75-3
- Molecular Weight276.21 g/mol
- AppreanceLiquid
- ColorPale yellow
- Boiling point285 ° C (at 760 mmHg)
- Viscosity12.7 cP(at 25 °C )
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TEMAZr
닫기
TEMAZr
Physical Characteristics
- Chemical nameZirconium tetra(ethylmethylamide)
- CAS No175923-04-3
- Molecular Weight323.63 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point378.7℃
- Viscosity3.4 cP(27℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
CpZr
닫기
CpZr
Physical Characteristics
- Chemical nameZirconium, (.eta.5-2,4-cyclopentadien-1-yl) tris(N-methylmethanaminato)-
- CAS No33271-88-4
- Molecular Weight288.55 g/mol
- AppreanceLiquid
- Colorpale yellow
- Boiling point311℃
- Viscosity7.24 mm2/s at 25℃
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
PCpZr
닫기
PCpZr
Physical Characteristics
- Chemical nameTris(N-methylmethanaminato)[(1,2,3,4,5-η)-1-propyl-2,4-cyclopentadien-1-yl]zirconium
- CAS No2192174-63-1
- Molecular Weight330.63 g/mol
- AppreanceLiquid
- Colorpale yellow
- Boiling point254 ℃(101.3 kPa)
- Viscosity7.21 cP (at 25℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
HfCl4
닫기
HfCl4
Physical Characteristics
- Chemical nameHafnium tetrachloride
- CAS No13499-05-3
- Molecular Weight320.3 g/mol
- AppreanceSolid(Powder)
- Colorwhite, orange
- Boiling pointNot available
- Vapour pressure1 ㎜Hg (at 190℃(sublimate))
- Viscosity0.64 cP (131 ℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TDMAHf
닫기
TDMAHf
Physical Characteristics
- Chemical nameN-Methylmethanamine,hafnium(4+)salt (4:1)
- CAS No19782-68-4
- Molecular Weight354.79 g/mol
- AppreanceSolid
- ColorNot available
- Melting point26 ~29 ℃
- Boiling point60 °C at 0.01 hPa
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TEMAHf
닫기
TEMAHf
Physical Characteristics
- Chemical nameN-Methylethanamine,hafnium(4+)salt
- CAS No352535-01-4
- Molecular Weight410.9 g/mol
- AppreanceLiquid
- Colorpale yellow
- Boiling point63 ° C (at 0.1 mmHg)
- Viscosity4.4 cP (at 21.76℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
CpHf
닫기
CpHf
Physical Characteristics
- Chemical name(η5-2,4-Cyclopentadien-1-yl)tris(N-methylmethanaminato)hafnium
- CAS No941596-80-1
- Molecular Weight375.81 g/mol
- AppreanceLiquid
- Colorpale yellow
- Boiling point300.4℃
- Viscosity8.2 cP at 25 ℃
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
ZOA801
닫기
ZOA801
Physical Characteristics
- Chemical nameTetrahydrofuran
- CAS No109-99-9
- Molecular Weight72.1 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point65.4℃
- Viscosity0.53 cP (20 ℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
Dielectric
Si is the most commonly-used element in semiconductor industry, and silicon containing materials are used in
various parts of semiconductor devices. Silicon-containing films such as insulating layer, etch stopper, hard mask, spacer and
double patterning dielectrics, require high quility conformal deposition process at low thermal buget.
BDEAS
닫기
BDEAS
Physical Characteristics
- Chemical nameBis(diethylamino)silane
- CAS No27804-64-4
- Molecular Weight174.36 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point188℃
- Viscosity0.82cp
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
BTBAS
닫기
BTBAS
Physical Characteristics
- Chemical nameN,N'-Bis(1,1-dimethylethyl)silanediamine
- CAS No186598-40-3
- Molecular Weight174.36 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point166℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
DIPAS
닫기
DIPAS
Physical Characteristics
- Chemical nameN,N-Bis(1-methylethyl)silanamine
- CAS No908831-34-5
- Molecular Weight131.3 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point116.9℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
HCDS
닫기
HCDS
Physical Characteristics
- Chemical nameHexachlorodisilane
- CAS No13465-77-5
- Molecular Weight268.83 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point145.5℃
- Viscosity1.65mPa.s
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
3DMAS
닫기
3DMAS
Physical Characteristics
- Chemical nameN,N,N`,N`,N``,N``-Hexamethylsilanetriamine
- CAS No15112-89-7
- Molecular Weight161.32 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point142℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
4MS
닫기
4MS
Physical Characteristics
- Chemical nameTetramethylsilane
- CAS No75-76-3
- Molecular Weight88.23 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point26.6℃
- Viscosity0.23 cSt at 25 °C
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TEOS
닫기
TEOS
Physical Characteristics
- Chemical nameTetraethoxy silane
- CAS No78-10-4
- Molecular Weight208.3 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point168.8℃
- Viscosity0.6 cP (25℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
SiCl4
닫기
SiCl4
Physical Characteristics
- Chemical nameSilicon tetrachloride
- CAS No10026-04-7
- Molecular Weight169.9 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point57.6 °C - lit.
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
DIS
닫기
DIS
Physical Characteristics
- Chemical nameDiiodosilane
- CAS No13760-02-6
- Molecular Weight283.91 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point149℃ ~ 150℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
BDMAMS
닫기
BDMAMS
Physical Characteristics
- Chemical nameBis(dimethylamino)methylsilane
- CAS No22705-33-5
- Molecular Weight132.28 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point112~113℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
TMDSO
닫기
TMDSO
Physical Characteristics
- Chemical name1,1,3,3-Tetramethyldisiloxane
- CAS No3277-26-7
- Molecular Weight134.3 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point72 ℃
- Viscosity0.7 cSt (@ 25 °C)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
PYRIDINE
닫기
PYRIDINE
Physical Characteristics
- Chemical namePyridine
- CAS No110-86-1
- Molecular Weight79.1 g/mol
- AppreanceLiquid
- ColorColorless - Pale yellow
- Boiling point115.5℃
- Viscosity0.97 cP (20℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
Barrier & Metal
Transition metal & metal nitrides are widely used in technology because of their hardness,
stability at high temperature, chemical inertness and stability, electrical and optical properties.
These properties make them the materials of choice for diffusion barrier in microelecronic applications.
TiCl4
닫기
TiCl4
Physical Characteristics
- Chemical nameTitanium tetrachloride
- CAS No7550-45-0
- Molecular Weight189.69 g/mol
- AppreanceLiquid
- ColorColorless or yellow
- Boiling point136.4℃
- Viscosity0.8 mPa · s (dynamic) at 20 ℃
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
CCTBA
닫기
CCTBA
Physical Characteristics
- Chemical nameHexacarbonyl (3,3-dimethyl-1-butyne)dicobalt
- CAS No56792-69-9
- Molecular Weight368.07 g/mol
- AppreanceLiquid
- ColorDeep Red
- Boiling point52 ° C (at 0.08 mmHg)
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
CpCo(CO)2
닫기
CpCo(CO)2
Physical Characteristics
- Chemical namedicarbonyl(eta5-2,4-cyclopentadien-1-yl)cobalt
- CAS No12078-25-0
- Molecular Weight180.05 g/mol
- AppreanceLiquid
- ColorNot available
- Boiling point140℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
Process Chemical
UP Chemical can serve special process & cleaning chemical for semiconductor and display industry.
OCTANE
닫기
OCTANE
Physical Characteristics
- Chemical nameOctane
- CAS No111-65-9
- Molecular Weight114.23 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point126℃
- Viscosity0.52 cP at 25℃
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
Coataid-20
닫기
Coataid-20
Physical Characteristics
- Chemical nameSolvent naphtha (petroleum), heavyarom.
- CAS No64742-94-5
- Molecular WeightNot available
- AppreanceLiquid
- ColorColorless
- Boiling point175℃ ~ 215℃
- Viscosity0.88 cst(20℃)
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
Encapsulation for Display
Organic light-emitting diodes (OLDEs) are becoming more important for use in flexible displays.
However, the organic materials used in OLED displays are very sensitive to water vapor and oxygen.
Making it important to develop a thin-film encapsulation layer suitable for flexible displays.
TMA
닫기
TMA
Physical Characteristics
- Chemical nameAluminum, trimethyl-
- CAS No75-24-1
- Molecular Weight72.1 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point125℃
- Viscosity0.9 cP at 30℃
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
DIPAS
닫기
DIPAS
Physical Characteristics
- Chemical nameN,N-Bis(1-methylethyl)silanamine
- CAS No908831-34-5
- Molecular Weight131.3 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point116.9℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
BTBAS
닫기
BTBAS
Physical Characteristics
- Chemical nameN,N'-Bis(1,1-dimethylethyl)silanediamine
- CAS No186598-40-3
- Molecular Weight174.36 g/mol
- AppreanceLiquid
- ColorColorless
- Boiling point166℃
- ViscosityNot available
Hazard Symbol
- 제품 상세 문의
- sales@upchem.co.kr
close