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¹ÝµµÃ¼ Àç·á (DRAM & Flash & Logic Device)
TBTDET
Physical Characteristics
Chemical Name
TBTDET
[Tertiary-Butyl Imido Tris-Diethyl Tantalum]
Formula
[(
t
BuN)Ta(N(C
2
H
5
)
2
)
3
]
Solid Content
468.5 g/mol
Boiling Point
95¡É/0.5torr
Vapor Pressure
0.1torr/100¡É
Density
1.25g/mL
Phase at 25 ¡É
Pale Yellow Liquid
Safety and Dangerous
NFPA ÄÚµå
À¯ÇØ ±×¸²
NFPA ÄÚµå
À¯ÇØ ±×¸²
Specification
- Assay: 99.9999% (metal base)